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Properties of the cathode lens combined with a focusing magnetic/immersion-magnetic lens
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SYSNO ASEP 0358594 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Properties of the cathode lens combined with a focusing magnetic/immersion-magnetic lens Author(s) Konvalina, Ivo (UPT-D) RID, ORCID, SAI
Müllerová, Ilona (UPT-D) RID, SAI, ORCIDNumber of authors 2 Source Title Nuclear Instruments & Methods in Physics Research Section A. - : Elsevier - ISSN 0168-9002
Roč. 645, č. 1 (2011), s. 55-59Number of pages 5 s. Language eng - English Country NL - Netherlands Keywords cathode lens ; compound objective lens ; aberration coefficients ; spot size ; field calculations Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects GAP102/10/1410 GA ČR - Czech Science Foundation (CSF) IAA100650902 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) CEZ AV0Z20650511 - UPT-D (2005-2011) UT WOS 000292713900012 DOI 10.1016/j.nima.2010.12.232 Annotation The cathode lens is an electron optical element in an emission electron microscope accelerating electrons from the sample, which serves as a source for a beam of electrons. Special application consists in using the cathode lens first for retardation of an illuminating electron beam and then for acceleration of reflected as well as secondary electrons, made in the directly imaging low energy electron microscope or in its scanning version discussed here. In order to form a real image, the cathode lens has to be combined with a focusing magnetic lens or a focusing immersion-magnetic lens, as used for objective lenses of some commercial scanning electron microscopes. These two alternatives are compared with regards to their optical properties, in particular with respect to predicted aberration coefficients and the spot size, as well as the optimum angular aperture of the primary beam. The important role of the final aperture size on the image resolution is also presented. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2012
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