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Ion current to a substrate in the pulsed dc hollow cathode plasma jet deposition system
- 1.VIROSTKO, Petr, HUBIČKA, Zdeněk, ČADA, Martin, TICHÝ, M. Ion current to a substrate in the pulsed dc hollow cathode plasma jet deposition system. Journal of Physics D-Applied Physics. 2010, 43(12), 1-7. ISSN 0022-3727. E-ISSN 1361-6463. Available: doi: 10.1088/0022-3727/43/12/124019.
Number of the records: 1