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Investigation of mechanical properties of gold thin films using a bulge test technique
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SYSNO ASEP 0353863 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Investigation of mechanical properties of gold thin films using a bulge test technique Author(s) Hémel, A. (FR)
Jacques, A. (FR)
Schenk, T. (FR)
Ferry, O. (FR)
Kruml, Tomáš (UFM-A) RID, ORCIDNumber of authors 5 Source Title Journal of Physics: Conference Series. - : Institute of Physics Publishing - ISSN 1742-6588
Roč. 240, - (2010), 012163Number of pages 4 s. Action ICSMA-15 (15th International Conference on the Strength of Materials) Event date 16.08.2009-21.08.2009 VEvent location Dresden Country DE - Germany Event type WRD Language eng - English Country GB - United Kingdom Keywords thin films ; bulge test ; mechanical properties Subject RIV JJ - Other Materials CEZ AV0Z20410507 - UFM-A (2005-2011) UT WOS 000286515800163 DOI 10.1088/1742-6596/240/1/012163 Annotation A bulge test device has been built, with the aim to perform mechanical tests on membranes with a thickness in the 100 nm to 10 μm ranges, between room temperature and 900 °C.Our set up a differential atmospheric pressure is applied across a membrane, while the deflection is measured using a laser interferometer. We show first results obtained from gold membranes with different thicknesses. Workplace Institute of Physics of Materials Contact Yvonna Šrámková, sramkova@ipm.cz, Tel.: 532 290 485 Year of Publishing 2011
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