Characterization of off-axis single target RF magnetron co-sputtered iron doped tin

0353788 - ÚJF 2011 RIV CH eng J - Journal Article
Kormunda, M. - Pavlík, J. - Macková, Anna - Malinský, Petr
Characterization of off-axis single target RF magnetron co-sputtered iron doped tin.
Surface and Coatings Technology. Roč. 205, - (2010), S120-S124. ISSN 0257-8972
R&D Projects: GA MŠMT(CZ) LC06041
Institutional research plan: CEZ:AV0Z10480505
Keywords : Magnetron co-sputtering * Off-axis deposition * Amorphous stannic oxide
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 2.135, year: 2010

The iron doped SnO2 coatings for sensor applications were studied by AFM, XPS, RBS and XRD techniques. The coatings were deposited by a magnetron sputtering from a single SnO2 target with an iron inset. Two different off-axis deposition arrangements were investigated. The iron concentration in the coating was controlled in the range from 0 up to 5 at.% by two basic external parameters, the fraction of the iron stripe directly in the erosion zone and the RF power. The deposition process was reproducible and deposited substoichiometric Fe:SnO2 films were homogenous, flat, amorphous and thermally stable up to post deposition annealing at 600 °C. The elevated deposition temperatures up to 400 °C and post annealing up to 600 °C for 10 min or 400 °C for 25 h had no significant influence on the composition, the topology and the structure of coatings. The iron dopant in the film has probably α-Fe2O3 bonding structure.
Permanent Link: http://hdl.handle.net/11104/0192935