Number of the records: 1
Use of electronics product definition for the development of differentially pumped chamber
- 1.0352595 - ÚPT 2011 RIV CZ eng C - Conference Paper (international conference)
Maxa, J. - Neděla, Vilém
Use of electronics product definition for the development of differentially pumped chamber.
EDS'10 - Electronic Devices and Systems IMAPS CS International Conference 2010 - Proceedings. Brno: Vysoké učení technické v Brně, 2010, s. 215-223. ISBN 978-80-214-4138-5.
[EDS '10 - Electronic Devices and Systems IMAPS CS International Conference. Brno (CZ), 01.09.2010-02.09.2010]
R&D Projects: GA ČR GAP102/10/1410
Institutional research plan: CEZ:AV0Z20650511
Keywords : EREM * CAx * SolidWorks * Cosmos * FEI
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Environmental scanning electron microscope creates new possibilities in the field of examination various types of specimens and their phases. The article analyses 3nd compares the results of air pumping measurement for selected shapes of the differentially pumped chamber to create vacuum, using the Cosmos FloWorks system.
Permanent Link: http://hdl.handle.net/11104/0192070
Number of the records: 1