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Multiaxis interferometric system for positioning in nanometrology
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SYSNO 0352186 Title Multiaxis interferometric system for positioning in nanometrology Author(s) Lazar, Josef (UPT-D) RID, ORCID, SAI
Číp, Ondřej (UPT-D) RID, SAI, ORCID
Čížek, Martin (UPT-D) RID, ORCID, SAI
Hrabina, Jan (UPT-D) RID, ORCID, SAI
Šerý, Mojmír (UPT-D) RID, SAI
Klapetek, P. (CZ)Source Title Proceedings of the 9th WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronic. S. 92-95. - Sofia : WSEAS EUROPMENT Press, 2010 Conference WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronic /9./, Catania, 29.05.2010-31.10.2010 Document Type Konferenční příspěvek (zahraniční konf.) CEZ AV0Z20650511 - UPT-D (2005-2011) Language eng Country BG Keywords nanometrology * interferometry * traceability * local probe microscopy * nanopositioning Permanent Link http://hdl.handle.net/11104/0191759
Number of the records: 1