Number of the records: 1
Multiaxis interferometric system for positioning in nanometrology
- 1.
SYSNO ASEP 0352186 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Multiaxis interferometric system for positioning in nanometrology Author(s) Lazar, Josef (UPT-D) RID, ORCID, SAI
Číp, Ondřej (UPT-D) RID, SAI, ORCID
Čížek, Martin (UPT-D) RID, ORCID, SAI
Hrabina, Jan (UPT-D) RID, ORCID, SAI
Šerý, Mojmír (UPT-D) RID, SAI
Klapetek, P. (CZ)Number of authors 6 Source Title Proceedings of the 9th WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronic. - Sofia : WSEAS EUROPMENT Press, 2010 - ISSN 1790-5117 - ISBN 978-954-92600-3-8 Pages s. 92-95 Number of pages 4 s. Action WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronic /9./ Event date 29.05.2010-31.10.2010 VEvent location Catania Country IT - Italy Event type WRD Language eng - English Country BG - Bulgaria Keywords nanometrology ; interferometry ; traceability ; local probe microscopy ; nanopositioning Subject RIV BH - Optics, Masers, Lasers CEZ AV0Z20650511 - UPT-D (2005-2011) Annotation We present a system for dimensional nanometrology based on scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of sample profile combined with interferometer controlled positioning. The interferometric setup not only improves resolution of the position control but also ensures direct traceability to the primary etalon of length. The system was developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology. The interferometers are supplied from a frequency doubled Nd:YAG laser stabilized by linear absorption spectroscopy in molecular iodine and the interferometric configuration controls the stage position in all six degrees of freedom. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2011
Number of the records: 1