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Multiaxis interferometric system for positioning in nanometrology
- 1.Lazar, J., Číp, O., Čížek, M., Hrabina, J., Šerý, M., Klapetek, P. Multiaxis interferometric system for positioning in nanometrology. In: Proceedings of the 9th WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronic. Sofia: WSEAS EUROPMENT Press, 2010, s. 92-95. ISBN 978-954-92600-3-8. ISSN 1790-5117.
Number of the records: 1