Number of the records: 1
Multiaxis interferometric system for positioning in nanometrology
- 1.LAZAR, Josef, ČÍP, Ondřej, ČÍŽEK, Martin, HRABINA, Jan, ŠERÝ, Mojmír, KLAPETEK, P. Multiaxis interferometric system for positioning in nanometrology. In: Proceedings of the 9th WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronic. Sofia: WSEAS EUROPMENT Press, 2010, s. 92-95. ISBN 978-954-92600-3-8. ISSN 1790-5117.
Number of the records: 1