Laser interferometric measuring system for positioning in nanometrology

Number of the records: 1

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SYSNO	0351325
Title	Laser interferometric measuring system for positioning in nanometrology
Author(s)	Lazar, Josef (UPT-D)_{RID, ORCID, SAI} Číp, Ondřej (UPT-D)_{RID, SAI, ORCID} Čížek, Martin (UPT-D)_{RID, ORCID, SAI} Hrabina, Jan (UPT-D)_{RID, ORCID, SAI} Šerý, Mojmír (UPT-D)_{RID, SAI}
Source Title	WSEAS Transactions on Circuits and Systems. Roč. 9, č. 10 (2010), s. 660-669
Document Type	Článek v odborném periodiku
Grant	LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	KAN311610701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	FR-TI1/241 GA MPO - Ministry of Industry and Trade (MPO)
	GA102/09/1276 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Language	eng
Country	GR
Keywords	Interferometry * local probe microscopy * nanometrology * nanopositioning * traceability
Permanent Link	http://hdl.handle.net/11104/0191103

Number of the records: 1