Number of the records: 1
Laser interferometric measuring system for positioning in nanometrology
- 1.0351325 - ÚPT 2011 RIV GR eng J - Journal Article
Lazar, Josef - Číp, Ondřej - Čížek, Martin - Hrabina, Jan - Šerý, Mojmír
Laser interferometric measuring system for positioning in nanometrology.
WSEAS Transactions on Circuits and Systems. Roč. 9, č. 10 (2010), s. 660-669. ISSN 1109-2734
R&D Projects: GA MŠMT(CZ) LC06007; GA AV ČR KAN311610701; GA MPO FR-TI1/241; GA ČR GA102/09/1276
Institutional research plan: CEZ:AV0Z20650511
Keywords : Interferometry * local probe microscopy * nanometrology * nanopositioning * traceability
Subject RIV: BH - Optics, Masers, Lasers
Permanent Link: http://hdl.handle.net/11104/0191103
Number of the records: 1