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Laser interferometric measuring system for positioning in nanometrology
- 1.LAZAR, J., ČÍP, O., ČÍŽEK, M., HRABINA, J., ŠERÝ, M. Laser interferometric measuring system for positioning in nanometrology. WSEAS Transactions on Circuits and Systems. 2010, 9(10), 660-669. ISSN 1109-2734.
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