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Prospects of the scanning low energy electron microscopy in materials science
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SYSNO ASEP 0350665 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Prospects of the scanning low energy electron microscopy in materials science Author(s) Mikmeková, Šárka (UPT-D) RID, SAI, ORCID
Hovorka, Miloš (UPT-D)
Konvalina, Ivo (UPT-D) RID, ORCID, SAI
Müllerová, Ilona (UPT-D) RID, SAI, ORCID
Frank, Luděk (UPT-D) RID, SAI, ORCIDNumber of authors 5 Source Title Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. - Brno : Institute of Scientific Instruments AS CR, v.v.i, 2010 / Mika F. - ISBN 978-80-254-6842-5 Pages s. 37-38 Number of pages 2 s. Action International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./ Event date 31.05.2010-04.06.2010 VEvent location Skalský dvůr Country CZ - Czech Republic Event type WRD Language eng - English Country CZ - Czech Republic Keywords scanning low energy electron microscopy ; scanning electron microscopy ; transmission electron microscopy ; focused ion beam microscopy ; cathode lens mode Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects OE08012 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) CEZ AV0Z20650511 - UPT-D (2005-2011) UT WOS 000290773700013 Annotation The use of the scanning low energy electron microscopy (SLEEM) has been slowly making its way into the field of materials science, hampered not by limitations in the technique but rather by the relative scarcity of these instruments in research institutes and laboratories. Various techniques exist which are capable of studying the material microstructure, with the scanning electron microscopy (SEM), (scanning) transmission microscopy ((S)TEM) and focused ion beam (FIB) microscopy being perhaps the most known. A specific way to visualizing the microstructure of materials at high spatial resolution, to achieve a high contrast between grains in polycrystals and very fast data acquisition is to use the cathode lens (CL) mode in SEM. The CL mode in the SEM enables us to detect slow but not only slow, high angle scattered electrons that carry mainly crystallographic contrast based on the electron channeling, mostly in the Mott scattering angular range. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2011
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