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Comparison of techniques for diffraction grating topography analysis
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SYSNO ASEP 0350662 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Comparison of techniques for diffraction grating topography analysis Author(s) Matějka, Milan (UPT-D) RID, ORCID, SAI
Rek, Antonín (UPT-D) RID
Mika, Filip (UPT-D) RID, SAI, ORCID
Fořt, Tomáš (UPT-D) RID, ORCID, SAI
Matějková, Jiřina (UPT-D)Number of authors 5 Source Title Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. - Brno : Institute of Scientific Instruments AS CR, v.v.i, 2010 / Mika F. - ISBN 978-80-254-6842-5 Pages s. 29-32 Number of pages 4 s. Action International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./ Event date 31.05.2010-04.06.2010 VEvent location Skalský dvůr Country CZ - Czech Republic Event type WRD Language eng - English Country CZ - Czech Republic Keywords Atomic Force Microscopy ; AEM ; Scanning Electron Microscopy ; SEM ; topography imaging Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering CEZ AV0Z20650511 - UPT-D (2005-2011) UT WOS 000290773700010 Annotation There are a wide range of analytical techniques which may be used for surface structure characterization. For high resolution surface investigations, two commonly used techniques are Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM). Both techniques are capable resolve surface structure down to the nanometer in scale. However the mechanism of topography imaging and type of information acquired is different. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2011
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