Number of the records: 1  

Comparison of techniques for diffraction grating topography analysis

  1. 1.
    SYSNO ASEP0350662
    Document TypeC - Proceedings Paper (int. conf.)
    R&D Document TypeConference Paper
    TitleComparison of techniques for diffraction grating topography analysis
    Author(s) Matějka, Milan (UPT-D) RID, ORCID, SAI
    Rek, Antonín (UPT-D) RID
    Mika, Filip (UPT-D) RID, SAI, ORCID
    Fořt, Tomáš (UPT-D) RID, ORCID, SAI
    Matějková, Jiřina (UPT-D)
    Number of authors5
    Source TitleProceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. - Brno : Institute of Scientific Instruments AS CR, v.v.i, 2010 / Mika F. - ISBN 978-80-254-6842-5
    Pagess. 29-32
    Number of pages4 s.
    ActionInternational Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./
    Event date31.05.2010-04.06.2010
    VEvent locationSkalský dvůr
    CountryCZ - Czech Republic
    Event typeWRD
    Languageeng - English
    CountryCZ - Czech Republic
    KeywordsAtomic Force Microscopy ; AEM ; Scanning Electron Microscopy ; SEM ; topography imaging
    Subject RIVJA - Electronics ; Optoelectronics, Electrical Engineering
    CEZAV0Z20650511 - UPT-D (2005-2011)
    UT WOS000290773700010
    AnnotationThere are a wide range of analytical techniques which may be used for surface structure characterization. For high resolution surface investigations, two commonly used techniques are Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM). Both techniques are capable resolve surface structure down to the nanometer in scale. However the mechanism of topography imaging and type of information acquired is different.
    WorkplaceInstitute of Scientific Instruments
    ContactMartina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
    Year of Publishing2011
Number of the records: 1  

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