Mapping of dopants by electron injection

Number of the records: 1

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SYSNO	0350658
Title	Mapping of dopants by electron injection
Author(s)	Hovorka, Miloš (UPT-D) Konvalina, Ivo (UPT-D)_{RID, ORCID, SAI} Frank, Luděk (UPT-D)_{RID, SAI, ORCID}
Source Title	Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. S. 15-16. - Brno : Institute of Scientific Instruments AS CR, v.v.i, 2010 / Mika F.
Conference	International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./, Skalský dvůr, 31.05.2010-04.06.2010
Document Type	Konferenční příspěvek (zahraniční konf.)
Grant	GP102/09/P543 GA ČR - Czech Science Foundation (CSF)
	IAA100650803 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Language	eng
Country	CZ
Keywords	silicon structures * secondary electron emission * very low energy range * mapping dopants
Permanent Link	http://hdl.handle.net/11104/0190598

Number of the records: 1