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High hydrogen dilution and low substrate temperature cause columnar growth of hydrogenated amorphous silicon
- 1.BRONSVELD, P.C.P., MATES, T., FEJFAR, A., KOČKA, J., RATH, J.K., SCHROPP, R.E.I. High hydrogen dilution and low substrate temperature cause columnar growth of hydrogenated amorphous silicon. Physica Status Solidi A. 2010, 207(3), 525-529. ISSN 1862-6300. E-ISSN 1862-6319. Available: doi: 10.1002/pssa.200982847.
Number of the records: 1