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Study of Er+ ion-implanted lithium niobate structure after an annealing procedure by RBS and RBS/channelling
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SYSNO ASEP 0343535 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Study of Er+ ion-implanted lithium niobate structure after an annealing procedure by RBS and RBS/channelling Author(s) Macková, Anna (UJF-V) RID, ORCID, SAI
Malinský, Petr (UJF-V) RID, ORCID, SAI
Švecová, B. (CZ)
Nekvindová, P. (CZ)
Groetzschel, R. (DE)Source Title Nuclear Instruments & Methods in Physics Research Section B. - : Elsevier - ISSN 0168-583X
Roč. 268, 11-12 (2010), s. 2042-2045Number of pages 4 s. Action 19th International conference on Ion beam analysis Event date 07.09.2009-11.09.2009 VEvent location Cambridge Country GB - United Kingdom Event type WRD Language eng - English Country NL - Netherlands Keywords Lithium niobate ; Erbium ; Ion implantation Subject RIV BG - Nuclear, Atomic and Molecular Physics, Colliders R&D Projects LC06041 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GA106/09/0125 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z10480505 - UJF-V (2005-2011) UT WOS 000278702300076 DOI 10.1016/j.nimb.2010.02.021 Annotation Erbium-doped lithium niobate (Er:LiNbO3) is a prospective photonics component, operating at = 1.5 lm, which could be used as an optical amplifier or waveguide laser. We have focused on the structure of Er:LiNbO3 layers created by 330 keV erbium ion implantation (fluences 1,0x1015, 2,5x1015and 1,0x1016 cm-2) in the X, Z and two various Y crystallographic cuts of LiNbO3. Five hours annealing at 350°C was applied to recrystallize the as-implanted layer and to avoid clustering of Er. Depth distribution of implanted Er has been measured by Rutherford Backscattering Spectroscopy (RBS) using 2 MeV He+ ions. Defects distribution and structural changes have been described using the RBS/channelling method. Data obtained made it possible to reveal the relations between the crystallographic orientation of the implanted crystal and the behaviour during the restoration process. The deepest modified layer has been observed in the perpendicular Y cut, which also exhibits the lowest reconstruction after annealing. Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2011
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