Number of the records: 1
SiC.sub.x./sub. layers prepared by hybrid laser deposition and PLD
- 1.JELÍNEK, M., KOCOUREK, T., ZEMEK, J., KADLEC, J. SiCx layers prepared by hybrid laser deposition and PLD. Plasma Processes and Polymers. 2009, 6(S1), 5366-5369. ISSN 1612-8850. E-ISSN 1612-8869. Available: doi: 10.1002/ppap.200930803
Number of the records: 1