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Er+ medium energy ion implantation into lithium niobate
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SYSNO ASEP 0334375 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Er+ medium energy ion implantation into lithium niobate Author(s) Švecová, B. (CZ)
Nekvindová, P. (CZ)
Macková, Anna (UJF-V) RID, ORCID, SAI
Oswald, Jiří (FZU-D) RID, ORCID
Vacík, Jiří (UJF-V) RID, ORCID, SAI
Grotzschel, R. (DE)
Spirkova, J. (CZ)Source Title Nuclear Instruments & Methods in Physics Research Section B. - : Elsevier - ISSN 0168-583X
Roč. 267, 8-9 (2009), s. 1332-1335Number of pages 4 s. Language eng - English Country NL - Netherlands Keywords lithium niobate ; erbium ; ion implantation Subject RIV BG - Nuclear, Atomic and Molecular Physics, Colliders R&D Projects LC06041 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) IAA200480702 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z10480505 - UJF-V (2005-2011) AV0Z10100521 - FZU-D (2005-2011) UT WOS 000266519900031 DOI 10.1016/j.nimb.2009.01.041 Annotation Erbium-doped lithium niobate (Er: LiNbO3) is a prospective photonics component, operating at 1.5 m, which could find its use chiefly as an optical amplifier or waveguide laser. In this study, we have focused on the properties of the optically active Er: LiNbO3 layers, which are fabricated by medium energy ion implantation under various experimental conditions. Erbium ions were implanted at energies of 330 and 500 keV with fluences of 1.0x1015, 2.5x1015 and 1.0x1016 cm-2 into LiNbO3 single-crystalline cuts of various orientations. The as-implanted samples were annealed in air at 350 °C for 5 h. The depth distribution and diffusion profiles of the implanted Er were measured by Rutherford Backscattering Spectroscopy (RBS) using 2 MeV He+ ions. The projected range RP and projected range straggling RP were calculated employing the SRIM code. The damage distribution and structural changes were described usány the RBS/channelling method. Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2010
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