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Homogenization of CZ Si wafers by Tabula Rasa annealing
- 1.MEDUŇA, M., CAHA, O., KUBĚNA, J., KUBĚNA, A., BURŠÍK, Jiří. Homogenization of CZ Si wafers by Tabula Rasa annealing. Physica B-Condensed Matter. 2009, 404(-), 4637-4640. ISSN 0921-4526. E-ISSN 1873-2135.
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