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FR magnetron sputtering of Se doped Ge-Sb-Te thin films
- 1.0328395 - ÚMCH 2010 CZ eng A - Abstract
Gutwirth, J. - Wágner, T. - Bartoš, M. - Bezdička, Petr - Orava, J. - Kotulanová, Eva - Vlček, Milan - Přikryl, J. - Frumar, M.
FR magnetron sputtering of Se doped Ge-Sb-Te thin films.
E/PCOS 2008 Submitted Papers. Pardubice: University of Pardubice, 2008. s. 203. ISBN N.
[European /Phase Change and Ovonics Symposium. 08.09.2008-09.09.2008, Praha]
R&D Projects: GA MŠMT LC523; GA ČR GA203/06/1368
Institutional research plan: CEZ:AV0Z40500505
Keywords : RF magnetron * thin films
Subject RIV: CA - Inorganic Chemistry
Permanent Link: http://hdl.handle.net/11104/0174721
Number of the records: 1