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Modelling of RF discharge in argon plasma
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SYSNO ASEP 0320055 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Modelling of RF discharge in argon plasma Title Model RF výboje v argonovém plazmatu Author(s) Jelínek, Pavel (FZU-D) RID, ORCID
Virostko, Petr (FZU-D)
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Bartoš, P. (CZ)Source Title Proceedings of the International Conference on Computational Methods in Science and Engineering 2007 (ICCMSE 2007): Volume 2, Part B. - Melville : American Institut of Physics, 2007 / Simos T.E. ; Maroulis G. - ISBN 978-0-7354-0476-2 Pages s. 1240-1243 Number of pages 4 s. Action International Conference on Computational Methods in Science and Engineering 2007 (ICCMSE 2007) Event date 25.09.2007-30.09.2007 VEvent location Corfu Country GR - Greece Event type WRD Language eng - English Country US - United States Keywords particle modelling ; fluid modelling ; hybrid modelling ; argon plasma ; RF plasma Subject RIV BL - Plasma and Gas Discharge Physics R&D Projects KAN400720701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) GA202/06/0776 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z10100522 - FZU-D (2005-2011) AV0Z10100521 - FZU-D (2005-2011) UT WOS 000252602900305 Annotation An one-dimensional hybrid model of RF discharge in low-temperature argon plasma is presented in our paper. The hybrid model consists of two parts—particle model which simulates fast electrons while fluid model simulates slow electrons and positive argon ions. Typical results of our calculations presented in this paper are total RF current and RF voltage waveforms on the planar substrate immersed into argon plasma. The next results which can be found here are the ion, electron and displacement current waveforms on the substrate. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2012
Number of the records: 1