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Single-shot soft x-ray laser-induced ablative microstructuring of organic polymer with demagnifying projection
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SYSNO ASEP 0316451 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Single-shot soft x-ray laser-induced ablative microstructuring of organic polymer with demagnifying projection Title Ablační mikrostrukturování povrchu organického polymeru rentgenovým laserem Author(s) Mocek, Tomáš (FZU-D) RID, ORCID, SAI
Rus, Bedřich (FZU-D) ORCID
Kozlová, Michaela (FZU-D) RID, ORCID
Polan, Jiří (FZU-D)
Homer, Pavel (FZU-D) RID
Juha, Libor (FZU-D) RID, ORCID, SAI
Hájková, Věra (FZU-D) RID, ORCID
Chalupský, Jaromír (FZU-D) RID, ORCIDSource Title Optics Letters. - : Optical Society of America - ISSN 0146-9592
Roč. 33, č. 10 (2008), s. 1087-1089Number of pages 3 s. Language eng - English Country US - United States Keywords x-ray lasers ; laser ablation ; microstructuring Subject RIV BH - Optics, Masers, Lasers R&D Projects KAN300100702 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) GA202/05/2316 GA ČR - Czech Science Foundation (CSF) LC510 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) LC528 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) LA08024 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) CEZ AV0Z10100523 - FZU-D (2005-2011) UT WOS 000256520500018 DOI 10.1364/OL.33.001087 Annotation We report on a single-shot micropatterning of an organic polymer achieved by ablation with demagnifying projection using a Ne-like Zn 21.2 nm soft x-ray laser. A nickel mesh with a period of 100 mu m was similar to 10x demagnified and imprinted on poly(methyl methacrylate) via direct ablation. The quality of the ablated microstructure was found to be mainly dependent on the quality of the projected mask. This first demonstration (to our knowledge) of single-shot projection, single-step lithography illustrates the potential of soft x-ray lasers for the direct patterning of materials with a resolution scalable down to submicrometer domain. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2009
Number of the records: 1