A comparison of plasma in laser and hybrid laser-magnetron SiC deposition systems

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SYSNO	0309732
Title	A comparison of plasma in laser and hybrid laser-magnetron SiC deposition systems
Title	Srovnání plazmatu v laserových a hybridních laser-magnetronových systémech pro přípravu SiC
Author(s)	Novotný, Michal (FZU-D)_{RID, ORCID, SAI} Bulíř, Jiří (FZU-D)_{RID, ORCID, SAI} Lančok, Ján (FZU-D)_{RID, ORCID} Jelínek, Miroslav (FZU-D)_{RID, ORCID}
Source Title	Plasma Processes and Polymers. Roč. 4, - (2007), S1017-S1021. - : Wiley
Document Type	Článek v odborném periodiku
Grant	KJB1010417 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	GA202/06/0216 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z10100522 - FZU-D (2005-2011)
Language	eng
Country	DE
Keywords	laser ablation * magnetron sputtering * optical emission spectroscopy
Permanent Link	http://hdl.handle.net/11104/0161781

Number of the records: 1