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A comparison of plasma in laser and hybrid laser-magnetron SiC deposition systems
- 1.NOVOTNÝ, Michal, BULÍŘ, Jiří, LANČOK, Ján, JELÍNEK, Miroslav. A comparison of plasma in laser and hybrid laser-magnetron SiC deposition systems. Plasma Processes and Polymers. 2007, 4(-), S1017-S1021. ISSN 1612-8850. E-ISSN 1612-8869. Available: https://doi.org/10.1002/ppap.200732320
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