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Influence of substrate material on plasma in deposition/sputtering reactor: experiment and computer simulation
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SYSNO 0308150 Title Influence of substrate material on plasma in deposition/sputtering reactor: experiment and computer simulation Title Vliv vzorku na plazma v depozičním/odprašovacím reaktoru: experiment a počítačová simulace Author(s) Brzobohatý, Oto (UPT-D) RID, ORCID, SAI
Buršíková, V. (CZ)
Nečas, D. (CZ)
Valtr, M. (CZ)
Trunec, D. (CZ)Source Title Journal of Physics D-Applied Physics. Roč. 41, č. 3 (2008), 035213:1-8. - : Institute of Physics Publishing Document Type Článek v odborném periodiku Grant GA202/07/1669 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z20650511 - UPT-D (2005-2011) Language eng Country GB Keywords r. f. plasma * computer simulation * secondary electron emision * plasma deposition * plasma sputtering Permanent Link http://hdl.handle.net/11104/0160716
Number of the records: 1