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Influence of substrate material on plasma in deposition/sputtering reactor: experiment and computer simulation

  1. 1.
    SYSNO0308150
    TitleInfluence of substrate material on plasma in deposition/sputtering reactor: experiment and computer simulation
    TitleVliv vzorku na plazma v depozičním/odprašovacím reaktoru: experiment a počítačová simulace
    Author(s) Brzobohatý, Oto (UPT-D) RID, ORCID, SAI
    Buršíková, V. (CZ)
    Nečas, D. (CZ)
    Valtr, M. (CZ)
    Trunec, D. (CZ)
    Source Title Journal of Physics D-Applied Physics. Roč. 41, č. 3 (2008), 035213:1-8. - : Institute of Physics Publishing
    Document TypeČlánek v odborném periodiku
    Grant GA202/07/1669 GA ČR - Czech Science Foundation (CSF)
    CEZAV0Z20650511 - UPT-D (2005-2011)
    Languageeng
    CountryGB
    Keywords r. f. plasma * computer simulation * secondary electron emision * plasma deposition * plasma sputtering
    Permanent Linkhttp://hdl.handle.net/11104/0160716
     
Number of the records: 1  

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