Number of the records: 1
Influence of substrate material on plasma in deposition/sputtering reactor: experiment and computer simulation
- 1.0308150 - ÚPT 2008 RIV GB eng J - Journal Article
Brzobohatý, Oto - Buršíková, V. - Nečas, D. - Valtr, M. - Trunec, D.
Influence of substrate material on plasma in deposition/sputtering reactor: experiment and computer simulation.
[Vliv vzorku na plazma v depozičním/odprašovacím reaktoru: experiment a počítačová simulace.]
Journal of Physics D-Applied Physics. Roč. 41, č. 3 (2008), 035213:1-8. ISSN 0022-3727. E-ISSN 1361-6463
R&D Projects: GA ČR GA202/07/1669
Institutional research plan: CEZ:AV0Z20650511
Keywords : r. f. plasma * computer simulation * secondary electron emision * plasma deposition * plasma sputtering
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 2.104, year: 2008
Permanent Link: http://hdl.handle.net/11104/0160716
Number of the records: 1