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Phase elements by means of photo-lithographic system employing a spatial light modulator
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SYSNO 0304116 Title Phase elements by means of photo-lithographic system employing a spatial light modulator Author(s) Aubrecht, Ivo (URE-Y)
Miler, Miroslav (URE-Y)
Pala, Jan (URE-Y)Source Title Photonics, Devices and Systems II. s. 63-66 / Hrabovský M. ; Senderáková D. ; Tománek P. Issue data Bellingham: SPIE The International Society for Optical Engineering, 2003 Edition Proceedings of SPIE. , 5036 ISBN 0-8194-4837-0 ISSN 0277-786X Conference Photonics Prague'2002 /4./, Prague, 26.05.2002-29.05.2002 Type of action Konference Document Type Konferenční příspěvek (zahraniční konf.) Grant GA202/01/0428 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z2067918 - URE-Y Language eng Country US Keywords spatial light modulators * photolitography * photoresists Permanent Link http://hdl.handle.net/11104/0114257
Number of the records: 1