Number of the records: 1
Journal of Vacuum Science & Technology B
SYS 0254104 LBL 00240nx^^^22001213^^450 005 20250516164539.4 011 $a 1071-1023 $e 2166-2754 100 $a 20050824aczey0103 ba 102 $a US 110 $a a 200 1-
$a Journal of Vacuum Science & Technology B 210 $c American Institute of Physics 301 $a Od roku 2019 ISSN 2166-2746 a eISSN 2166-2754. 801 $a CZ $b CAV $c 20050824
Number of the records: 1