Advances in Systems Science: Measurement, Circuits and Control

0205613 - UPT-D 20020164 RIV GR eng M - Monography Chapter
Matějka, František - Matějková, Jiřina - Vrba, R. - Beneš, P.
Means of Pressure Analysis using Nitride Silicon Diaphragm.
Advances in Systems Science: Measurement, Circuits and Control. Piraeus: WSES Press, 2001, s. 70 - 73. ISBN 960-8052-39-4
Institutional research plan: CEZ:AV0Z2065902
Keywords : diaphragm * distortion * pressure
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

This paper presents results obtained by measuring nitride diaphragm deflection in several cross sections by means of Talystep scanning profiler and by a new designed optical diffractive method. Mentioned methods were applied for analyses of diaphragms fabricated using LPCVD Si₃N₄ layers with 150 nm thick layer deposited on silicon substrate with crystallographic orientation (100), As a result there are space models of distortion of the whole diaphragm surface caused by known pressure acting to the diaphragm. Those models are exploited to optimize design of pressure sensor and modelling and simulation of its properties.
Permanent Link: http://hdl.handle.net/11104/0101226