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Modified Configuration of Ionization Detector for Environmental SEM
- 1.0205411 - UPT-D 20010051 RIV IT eng C - Conference Paper (international conference)
Michálek, Martin - Jirák, Josef
Modified Configuration of Ionization Detector for Environmental SEM.
Proceedings of 5th Multinational Congress on Electron Microscopy. Lecce: Rinton Press, 2001 - (Dini, L.; Catalano, M.), s. 529-530. ISBN 1-58949-003-7.
[MCEM '01 /5./ - Multinational Congress on Electron Microscopy. Lecce (IT), 20.09.2001-25.09.2001]
R&D Projects: GA ČR GA102/01/1271
Institutional research plan: CEZ:AV0Z2065902
Keywords : environmental scanning electron microscopy * non-conductive samples
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Environmental scanning electron microscopy enables observation of a sample in the specimen chamber at elevated pressure. Non-conductive or wet samples can be imaged without charging. Charge neutralization occurs due to presence of positive ions in the specimen chamber. The ionization and scintillation detectors can be used for detection of signal electrons.
Permanent Link: http://hdl.handle.net/11104/0101025
Number of the records: 1