Number of the records: 1
Dimension measurement in a cathode lens equipped low-energy SEM
- 1.0205239 - UPT-D 20000015 RIV CZ eng C - Conference Paper (international conference)
Hutař, Otakar - Oral, Martin - Müllerová, Ilona - Frank, Luděk
Dimension measurement in a cathode lens equipped low-energy SEM.
Proceedings of the 12th European Congress on Electron Microscopy. Brno: Czechoslovak Society for Electron Microscopy, 2000 - (Frank, L.; Čiampor, F.), s. I199-I200. ISBN 80-238-5503-4.
[EUREM /12./ - European Congress on Electron Microscopy. Brno (CZ), 09.07.2000-14.07.2000]
R&D Projects: GA AV ČR IBS2065017
Institutional research plan: CEZ:AV0Z2065902
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
The paper deals with calibration of magnification in a cathode lens equipped SEM, which provides a high resolution in the energy range below 2000 eV, where both the charging-up and edge effect phenomena, complicating the measurement of dimensions, are suppressed. An analytical expression for the image magnification, in the dependence on the electron impact energy and the working distance, is derived and verified with respect to the measured values. Finally, a procedure suitable for the routine calibration is proposed.
Permanent Link: http://hdl.handle.net/11104/0100857
Number of the records: 1