Number of the records: 1
Mechanism of the film composition formation during magnetron sputtering of WTi
- 1.Shaginyan, L. R. - Mišina, M. - Kadlec, S. - Jastrabík, L. - Macková, Anna - Peřina, Vratislav
Mechanism of the film composition formation during magnetron sputtering of WTi.
Journal of Vacuum Science & Technology A : Vacuum, Surfaces and Films. Roč. 19, č. 5 (2001), s. 2554-2566. ISSN 0734-2101. E-ISSN 1520-8559
R&D Projects: GA ČR GV202/97/K038; GA AV ČR KSK1010104
Impact factor: 1.448, year: 2001
http://hdl.handle.net/11104/0081781
Number of the records: 1