Number of the records: 1  

Dual implantation of Si with boron and argon ions

  1. 1.
    SYSNO0183382
    TitleDual implantation of Si with boron and argon ions
    Author(s) Popok, V. (CZ)
    Hnatowicz, Vladimír (UJF-V) RID
    Kvítek, Jiří (UJF-V)
    Švorčík, V. (CZ)
    Rybka, V. (CZ)
    Source Title Physica Status Solidi A : Applied Research. Roč. 141, - (1994), s. 93-98
    Document TypeČlánek v odborném periodiku
    Languageeng,
    CountryDE
    Permanent Linkhttp://hdl.handle.net/11104/0079883
     

Number of the records: 1  

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