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Dual implantation of Si with boron and argon ions
- 1.POPOK, V., HNATOWICZ, V., KVÍTEK, J., ŠVORČÍK, V., RYBKA, V. Dual implantation of Si with boron and argon ions. Physica Status Solidi A. 1994, 141(-), 93-98. ISSN 0031-8965.
Number of the records: 1