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RBS Characterization of rf Plasma Deposited Diamond-Like thin Films
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SYSNO ASEP 0183327 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title RBS Characterization of rf Plasma Deposited Diamond-Like thin Films Author(s) Peřina, Vratislav (UJF-V) RID
Janča, J. (CZ)Source Title Proceedings of Symposium on Plasma Physics and Technology /16./ / Píchal J.. - Praha, 1993 Pages s. 262-266 Action Symposium on Plasma Physics and Technology (16.) Event date 27.04.1993-29.04.1993 VEvent location Praha Country CZ - Czech Republic Language eng - English Country CZ - Czech Republic Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 1994
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