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RBS Characterization of rf Plasma Deposited Diamond-Like thin Films

  1. 1.
    PEŘINA, Vratislav, JANČA, J. RBS Characterization of rf Plasma Deposited Diamond-Like thin Films. In: PÍCHAL, J., ed. Proceedings of Symposium on Plasma Physics and Technology /16./. Praha, 1993, s. 262-266.

Number of the records: 1  

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