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IR Laser Induced Decomposition of Tetrakis(dimethylamido)Titanium for Chemical Vapor Deposition of TiN.sub.x./sub..
- 1.0180116 - UFCH-W 960262 RIV GB eng J - Journal Article
Janovská, Michaela - Bastl, Zdeněk
IR Laser Induced Decomposition of Tetrakis(dimethylamido)Titanium for Chemical Vapor Deposition of TiNx.
Infrared Physics and Technology. Roč. 37, - (1996), s. 727-731. ISSN 1350-4495. E-ISSN 1879-0275
R&D Projects: GA AV ČR IAA440109
Impact factor: 0.771, year: 1996
Permanent Link: http://hdl.handle.net/11104/0076825
Number of the records: 1