CO2 Laser Photosensitized Decomposition of Diethylsilane for Deposition of SiXC1-X Coatings

Number of the records: 1

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SYSNO	0164773
Title	CO2 Laser Photosensitized Decomposition of Diethylsilane for Deposition of SiXC1-X Coatings
Author(s)	Jakoubková, Marie (UCHP-M) Bastl, Zdeněk (UFCH-W)_{RID, ORCID} Šubrt, Jan (UACH-T)_{SAI, RID} Pokorná, Dana (UCHP-M)_{RID, SAI} Fajgar, Radek (UCHP-M)_{RID, ORCID, SAI} Pola, Josef (UCHP-M)_{RID, ORCID, SAI}
Source Title	ROMOPTO '94. Conference in Optics. Proceedings Series SPIE. s. 121-123, 2461 / Vlad V. I.. - Bellingham : SPIE, 1994
Conference	05.09.1994-08.09.1994, Bellingham, Conference in Optics ROMOPTO 94 /4./
Document Type	Abstrakt
Grant	IA47265 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
Language	eng
Country	US
Permanent Link	http://hdl.handle.net/11104/0061982

Number of the records: 1