CO2 Laser Photosensitized Decomposition of Diethylsilane for Deposition of SiXC1-X Coatings

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SYSNO ASEP	0164773
Document Type	A - Abstract
R&D Document Type	The record was not marked in the RIV
R&D Document Type	Není vybrán druh dokumentu
Title	CO2 Laser Photosensitized Decomposition of Diethylsilane for Deposition of SiXC1-X Coatings
Author(s)	Jakoubková, Marie (UCHP-M) Bastl, Zdeněk (UFCH-W)_{RID, ORCID} Šubrt, Jan (UACH-T)_{SAI, RID} Pokorná, Dana (UCHP-M)_{RID, SAI} Fajgar, Radek (UCHP-M)_{RID, ORCID, SAI} Pola, Josef (UCHP-M)_{RID, ORCID, SAI}
Source Title	ROMOPTO '94. Conference in Optics. Proceedings Series SPIE, 2461 / Vlad V. I.. - Bellingham : SPIE, 1994 - ISBN 0-8194-1813-7 s. 121-123
Action	Conference in Optics ROMOPTO 94 /4./
Event date	05.09.1994-08.09.1994
VEvent location	Bellingham
Country	US - United States
Language	eng - English
Country	US - United States
R&D Projects	IA47265 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
Workplace	Institute of Chemical Process Fundamentals
Contact	Eva Jirsová, jirsova@icpf.cas.cz, Tel.: 220 390 227
Year of Publishing	1996

Number of the records: 1