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Plasma-enhanced chemical vapour deposition amorphous Se and AsxSe1-x films

  1. 1.
    0161161 - SLCHPL-S 940032 RIV BE eng C - Conference Paper (international conference)
    Nagels, P. - Sleeckx, E. - Callaerts, R. - Tichý, Ladislav
    Plasma-enhanced chemical vapour deposition amorphous Se and AsxSe1-x films.
    -. Brussels, 1994, s. 215-220.
    [Proceeding of STDAS International Symposium /5./. Brussels (BE), 08.05.1994-10.05.1994]
    Permanent Link: http://hdl.handle.net/11104/0058568


     
     

Number of the records: 1  

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