0134622 - FZU-D 20030522 RIV US eng C - Conference Paper (international conference)
Boody, F. P. - Kempf, J. - Höpfl, R. - Hora, H. - Rohlena, Karel - Krása, Josef - Pfeifer, Miroslav - Woryna, E. - Wolowski, J. - Peřina, Vratislav
The laser ion implantation facility (LIIF): Design & First Results.
Proceedings on Lasers and Electro-Optics, CLEO 2000. Washington: XX, 2000, s. x-x.
[Lasers and Electro-Optics, CLEO 2000. San Francisco (US), 07.05.2000-12.05.2000]
R&D Projects: GA MŠMT LN00A100
Institutional research plan: CEZ:AV0Z1048901; CEZ:AV0Z1010921
Keywords : laser ion implantation
Subject RIV: BH - Optics, Masers, Lasers

The laser ion implantation facility has been designed to study the commercial feasibility of laser ion implantation using an industrial excimer laser. Design details and first results of characterizing the ion source and implanting ions will be presented.
Permanent Link: http://hdl.handle.net/11104/0032518