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Comparision of diamond nucleation in DC and AC substrate bias mode

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    0134495 - FZU-D 20030395 RIV NL eng J - Journal Article
    Kromka, Alexander - Janík, J. - Balon, F. - Kubovič, M. - Červeň, I. - Dubravcova, V.
    Comparision of diamond nucleation in DC and AC substrate bias mode.
    Thin Solid Films. Roč. 433, - (2003), s. 73-77. ISSN 0040-6090. E-ISSN 1879-2731
    EU Projects: European Commission(XE) HPRN-CT-1999-00139
    Institutional research plan: CEZ:AV0Z1010914
    Keywords : AC and DC bias nucleation * hot filament CVD * Raman spectroscopy
    Subject RIV: BM - Solid Matter Physics ; Magnetism
    Impact factor: 1.598, year: 2003

    Diamond films were grown by modified hot filament (HF) CVD technique, employing the double bias configuration. Prior to the diamond growth, a voltage source was connected between the substrate and the filaments placed above the substate to enhance the diamond nucleation.

    Permanent Link: http://hdl.handle.net/11104/0032395

     
     

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