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Comparision of diamond nucleation in DC and AC substrate bias mode
- 1.0134495 - FZU-D 20030395 RIV NL eng J - Journal Article
Kromka, Alexander - Janík, J. - Balon, F. - Kubovič, M. - Červeň, I. - Dubravcova, V.
Comparision of diamond nucleation in DC and AC substrate bias mode.
Thin Solid Films. Roč. 433, - (2003), s. 73-77. ISSN 0040-6090. E-ISSN 1879-2731
EU Projects: European Commission(XE) HPRN-CT-1999-00139
Institutional research plan: CEZ:AV0Z1010914
Keywords : AC and DC bias nucleation * hot filament CVD * Raman spectroscopy
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.598, year: 2003
Diamond films were grown by modified hot filament (HF) CVD technique, employing the double bias configuration. Prior to the diamond growth, a voltage source was connected between the substrate and the filaments placed above the substate to enhance the diamond nucleation.
Permanent Link: http://hdl.handle.net/11104/0032395
Number of the records: 1