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Catalysts for ozone sensitivity enhancement of thin sensors

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    0134476 - FZU-D 20030376 RIV CZ eng C - Conference Paper (international conference)
    Fryček, R. - Myslík, V. - Vrňata, M. - Jelínek, Miroslav
    Catalysts for ozone sensitivity enhancement of thin sensors.
    Electronic Devices and Systems 03 - Proceedings. Brno: VUT, Brno, 2003 - (Musil, V.), s. 336-339. ISBN 80-214-2452-4.
    [Electronic Devices Systems Conference 2003 /10./. Brno (CZ), 09.09.2003-10.09.2003]
    R&D Projects: GA ČR GA106/00/P011; GA ČR GA104/03/0406
    Grant - others:GA ČR(CZ) GP106/01/P089
    Institutional research plan: CEZ:AV0Z1010914
    Keywords : pulsed laser deposition * thin film * gas sensors, catalyst
    Subject RIV: BM - Solid Matter Physics ; Magnetism

    Inorganic(In2O3) and organic (InAcAc) thin films were created by pulsed laser deposition on special alumina chips by KrF excimer laser.Influence of addition catalyst was studied. Catalysts Ni, Fe and Zr were deposited by sputtering in sequence. After each step sensitivity and dynamic behavior were measured.
    Permanent Link: http://hdl.handle.net/11104/0032377

     
     

Number of the records: 1  

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