0134454 - FZU-D 20030354 RIV HU eng C - Conference Paper (international conference)
Pavlíček, Pavel
Height profile measurement by means of white-light interferometry.
Danubia-Adria Symposium on Experimental Methods in Solid Mechanics /20./. Budapest: Hungarian Scientific Society of Mechanical Engineering, 2003, s. 72-73. ISBN 963-9058-20-3.
[Danubia-Adria Symposium on Experimental Methods in Solid Mechanics /20./. Györ (HU), 24.09.2003-27.09.2003]
R&D Projects: GA MŠMT LN00A015
Institutional research plan: CEZ:AV0Z1010921
Keywords : white-light interferometry * height profile * rough surface
Subject RIV: BH - Optics, Masers, Lasers

White-light interferometer allows to measure the height ptrofile of smoot as of rough surface. A very low measurement uncertainty is independent on the measurement range, the ambiguity problem does not occur.
Permanent Link: http://hdl.handle.net/11104/0032355