Number of the records: 1
Energy-resolved mass spectroscopy of Ar-C.sub.2./sub.H.sub.2./sub.-N.sub.2./sub. plasma, performed during ion plating of TiC and Ti N hard coatings
- 1.Maček, M., Mišina, M., Čekada, M., Panjan, P. Energy-resolved mass spectroscopy of Ar-C2H2-N2 plasma, performed during ion plating of TiC and Ti N hard coatings. Surface and Coatings Technology. 2003, 174-175(-), 943-946. ISSN 0257-8972. E-ISSN 1879-3347.
Number of the records: 1