Thermal stability of microhardness and internal stress of hard a-C films with predominantly sp 2  bonds

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SYSNO ASEP	0134345
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Ostatní články
Title	Thermal stability of microhardness and internal stress of hard a-C films with predominantly sp 2 bonds
Author(s)	Kulykovskyy, Valeriy (FZU-D)_RID Vorlíček, Vladimír (FZU-D)_RID Boháč, Petr (FZU-D)_{RID, ORCID} Kurdyumov, A. (UA) Deineka, Alexander (FZU-D) Jastrabík, Lubomír (FZU-D)_{RID, ORCID}
Source Title	Diamond and Related Materials. - : Elsevier - ISSN 0925-9635 Roč. 12, - (2003), s. 1378-1384
Number of pages	7 s.
Language	eng - English
Country	CH - Switzerland
Keywords	diamond-like carbon ; sputtering ; mechanical properties
Subject RIV	BM - Solid Matter Physics ; Magnetism
R&D Projects	LN00A015 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	GA202/02/0216 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z1010914 - FZU-D
Annotation	Annealing in vacuum at temperatures up to 820 o C, microhardness, internal stress, electron diffraction, Raman and optical spectra of three sets of films with different initial microhardness were compared. Both the high internal stress and the specific film nanostricture are responsible for the high microhardness of these sp 2 -bonded films.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2004

Number of the records: 1