0134089 - FZU-D 20020378 RIV CZ eng J - Journal Article
Hubička, Zdeněk - Čada, Martin - Churpita, A. - Chvostová, Dagmar - Soukup, Ladislav - Jastrabík, Lubomír
Atmospheric Barrier-Torch Discharge Applied on tke Low Temperature Deposition.
Jemná mechanika a optika. 11-12, - (2002), s. 381-386. ISSN 0447-6441
R&D Projects: GA AV ČR IBS1010203; GA MŠMT LN00A015
Institutional research plan: CEZ:AV0Z1010921
Keywords : atmospheric barrier-torch * In_xO_y and SnO_x thin films * electrical conductivity * Langmuir probe
Subject RIV: BH - Optics, Masers, Lasers

The barier-torch discharge was used for a low temperature deposition of In_xO_y and SnO_x thin films at atmospheric pressure on polymer SiO₂ and Si substrates as well. Valpours of Sn- and In- acetylacetonat were used as growth precursors for the deposition process of SnO_x and In_xO_y films respectvely.
Permanent Link: http://hdl.handle.net/11104/0032026