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Study of titanium - carbon gradient layers grown by combination of laser deposition and magnetron sputtering
- 1.0134073 - FZU-D 20020362 RIV US eng C - Conference Paper (international conference)
Jelínek, Miroslav - Kadlec, J. - Kocourek, Tomáš - Boháč, Petr
Study of titanium - carbon gradient layers grown by combination of laser deposition and magnetron sputtering.
0-8194-4704-8. In: Lasers in Material Processing and Manufacturing. Bellingham: SPIE International Society for Optical Engineering, 2002 - (Deng, S.; Okada, T.; Behler, K.; Wang, X.), s. 305-309. Proceedings of SPIE., 4915. ISSN 0277-786X.
[Lasers in Material Processing and Manufacturing. Shanghai (CN), 16.10.2002-18.10.2002]
Institutional research plan: CEZ:AV0Z1010914
Keywords : pulsed laser deposition * magnetron sputtering * hybrid system
Subject RIV: BM - Solid Matter Physics ; Magnetism
Gradient titanium-carbon films were grown by hybrid deposition arrangement combining laser deposition and DC magnetron sputtering. Depth profile of carbon and nitrogen species, films adhesion and microhardness are studied.
Permanent Link: http://hdl.handle.net/11104/0032010
Number of the records: 1