Characterization of RF-spittered self-polarized PZT thin films for sensors arrays

Number of the records: 1

SYSNO ASEP	0134011
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Ostatní články
Title	Characterization of RF-spittered self-polarized PZT thin films for sensors arrays
Author(s)	Suchaneck, G. (DE) Lin, W. M. (DE) Koehler, R. (DE) Sandner, T. (DE) Gerlach, G. (DE) Krawietz, R. (DE) Pompe, W. (DE) Deineka, Alexander (FZU-D) Jastrabík, Lubomír (FZU-D)_{RID, ORCID}
Source Title	Vacuum. - : Elsevier - ISSN 0042-207X Roč. 66, - (2002), s. 473-478
Number of pages	6 s.
Language	eng - English
Country	GB - United Kingdom
Keywords	self-polarized PZT ; polarization and refractive index profiles ; IR sensor array
Subject RIV	BM - Solid Matter Physics ; Magnetism
R&D Projects	LN00A015 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	GA202/00/1425 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z1010914 - FZU-D
Annotation	In this work, a complex investigation of film composition, microstructure and physical properties of RF-sputtered self-polarized PZT thin filůms for IR sensor arrays was carried out. IR-radiation detector detectivity and noise equivalent temperature difference were calculated.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2003

Number of the records: 1